Aluminum scandium alloy sputtering target is a high-performance rare earth alloy functional material specifically used for preparing aluminum nitride piezoelectric films for high-frequency filters. This product is made from high-purity aluminum and scandium through precision alloying processes, featuring uniform composition, stable sputtering performance, and excellent film quality, which significantly improves the electromechanical coupling coefficient and device performance of piezoelectric films.
Application Areas
1.High-Frequency Filters: Used for piezoelectric functional layers in 5G communication, RF front-end, and surface acoustic wave/bulk acoustic wave filters.
2.Micro-Electromechanical Systems (MEMS): Suitable for high-performance piezoelectric films in MEMS sensors, resonators, and actuators.
3.Semiconductor Integrated Devices: Used for CMOS-compatible piezoelectric material integration to improve overall device performance.
4.Research and Special Devices: Used for research and development of new piezoelectric materials, high-frequency acoustic devices, and integrated electronics.
Theoretical Properties
|
Attribute |
Value/Description |
|
Purity |
3N (99.9%) |
|
Shape |
Rectangular target, circular target, custom-made |
|
Size |
2 inches, 8 inches, 12 inches, custom-made |
Health and Safety Information
|
Item |
Description |
|
Contact Protection |
Wear protective gloves and goggles during operation to avoid skin or eye contact. |
|
Inhalation Risk |
Dust may irritate the respiratory tract. It is recommended to handle in a ventilated environment or wear a dust mask. |
|
Storage Conditions |
Store in a dry, sealed container protected with inert gas (e.g., argon) to avoid oxidation and moisture. |
|
Emergency Response |
In case of eye or skin contact, rinse immediately with water and seek medical attention. If dust is inhaled, move to a well-ventilated area. |
|
Environmental Impact |
Discarded targets should be handled according to metal waste recycling regulations to avoid improper disposal. |
Packaging Specifications
Custom Packaging: Special packaging solutions can be provided according to customer requirements, including vacuum sealing, inert gas protection, and shock-resistant structures.
About Aluminum Scandium Alloy Sputtering Target
Aluminum scandium alloy sputtering target is a key raw material for preparing high-performance aluminum nitride piezoelectric films. By adjusting the scandium content, the electromechanical coupling coefficient of the film can be effectively improved, enabling the miniaturization, high performance, and CMOS process compatibility of devices such as high-frequency filters. This product is suitable for cutting-edge development and mass production applications in 5G communication, IoT, and advanced sensors.
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