Lanthanum sputtering target is a high-purity functional material widely used in semiconductors, optical coatings, and research fields. The product is made from high-purity lanthanum metal through precision processing, featuring excellent film uniformity, density, and sputtering stability. It is suitable for various coating processes, such as magnetron sputtering and ion beam sputtering.
Application Areas
1.Semiconductor Memory Chips: Used for preparing high-dielectric-constant lanthanum oxide films to solve memory leakage problems and improve device performance.High-purity lanthanum targets produce lanthanum oxide films with a high dielectric constant (24-27) and a large interface barrier with Si substrates, effectively solving leakage problems in memory chips.
2.Optical Coatings: Used for infrared optical components, anti-reflection coatings, and special glass coatings.
3.Research Experiments: Used for new material research, thin film physics studies, and surface engineering.
4.Electronic Components: Used for preparing thin film resistors, capacitors, and sensors.
Theoretical Properties
|
Attribute |
Value/Description |
|
Purity |
3N-4N (99.9-99.99%) |
|
Shape |
Rectangular target, circular target, custom-made |
|
Size |
2 inches, 8 inches, 12 inches, custom-made |
Health and Safety Information
|
Item |
Description |
|
Contact Protection |
Wear protective gloves and goggles during operation to avoid skin or eye contact. |
|
Inhalation Risk |
Dust may irritate the respiratory tract. It is recommended to handle in a ventilated environment or wear a dust mask. |
|
Storage Conditions |
Store in a dry, sealed container protected with inert gas (e.g., argon) to avoid oxidation and moisture. |
|
Emergency Response |
In case of eye or skin contact, rinse immediately with water and seek medical attention. If dust is inhaled, move to a well-ventilated area. |
|
Environmental Impact |
Discarded targets should be handled according to metal waste recycling regulations to avoid improper disposal. |
Packaging Specifications
Custom Packaging: Special packaging solutions can be provided according to customer requirements.
About Lanthanum Sputtering Target
Lanthanum sputtering target is a key raw material for high-end thin film preparation, especially in the semiconductor memory chip field. Its prepared lanthanum oxide films, with high dielectric constant and excellent interface properties, have become important materials for solving leakage problems in microelectronic devices. We offer a full range of high-purity, multi-size target products and support custom processing to meet the diverse needs of research and industrial production.
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